4. Drying and gas or vapor contact with solids
  5. Apparatus
  6. With means to treat gas or vapor

Masashi Omori

Inventor

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Multi-step flow cleaning method and multi-step flow cleaning...

Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate

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Steam drying apparatus, cleaning apparatus incorporating the sam

Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Patent

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Stream drying process

Drying and gas or vapor contact with solids – Process – With contacting of material treated with solid or liquid agent
Patent

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Wafer cleaning device and tray for use in wafer cleaning device

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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