Steam drying apparatus, cleaning apparatus incorporating the sam

Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor

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134 66, 118 58, 118 61, 118 69, F26B 2106

Patent

active

056089740

ABSTRACT:
A steam drying apparatus in which a process chamber is fitted at a loading opening with a lid which is closed from above. The inner side wall surface of the process chamber has a first surface formed in the lower part thereof and is substantially in parallel with the inner wall surface of the lid, and a second surface extending from the upper end part of the first surface and bent outwards to face the inner wall surface of the lid. The second surface is provided with a steam supply port for supplying the processing solution vapor into the process chamber. To the steam supply port is connected a steam supply means for supplying the processing solution vapor into the process chamber.

REFERENCES:
patent: 4777970 (1988-10-01), Kusuhara
patent: 5371950 (1994-12-01), Schumacher
patent: 5443540 (1995-08-01), Kamikawa

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