Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Patent
1995-09-11
1997-03-11
Sollecito, John M.
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
134 66, 118 58, 118 61, 118 69, F26B 2106
Patent
active
056089740
ABSTRACT:
A steam drying apparatus in which a process chamber is fitted at a loading opening with a lid which is closed from above. The inner side wall surface of the process chamber has a first surface formed in the lower part thereof and is substantially in parallel with the inner wall surface of the lid, and a second surface extending from the upper end part of the first surface and bent outwards to face the inner wall surface of the lid. The second surface is provided with a steam supply port for supplying the processing solution vapor into the process chamber. To the steam supply port is connected a steam supply means for supplying the processing solution vapor into the process chamber.
REFERENCES:
patent: 4777970 (1988-10-01), Kusuhara
patent: 5371950 (1994-12-01), Schumacher
patent: 5443540 (1995-08-01), Kamikawa
Doi Nobuaki
Ishikawa Hiroaki
Omori Masashi
Tanaka Hiroshi
Gravini Steve
Mitsubishi Denki & Kabushiki Kaisha
Ryoden Semiconductor System Engineering Corporation
Sollecito John M.
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