4. Optics: measuring and testing
  5. By polarized light examination
  6. With polariscopes

Masanori Akatsuka

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Birefringence distribution measuring method

Optics: measuring and testing – By polarized light examination – With polariscopes
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Method of manufacturing silicon epitaxial wafer

Semiconductor device manufacturing: process – Gettering of substrate
Reexamination Certificate

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SOI substrate and manufacturing method thereof

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1294510

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