4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Masahiro Shibamoto

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Film forming apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Magnetic recording disk, magnetic recording disk...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Multilayer film deposition apparatus, and method and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Substrate processing apparatus and cleaning method of the same

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2706892

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