4. Gas separation: processes
  5. Heat exchanging

Masahide Itoh

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Exhaust system for film forming apparatus

Gas separation: processes – Heat exchanging
Patent

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Method for detecting physical amount of object and optical...

Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate

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Microscope apparatus

Optical: systems and elements – Compound lens system – Microscope
Patent

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Process gas supply apparatus

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Profile ID: LFUS-PAI-P-1287891

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