Exhaust system for film forming apparatus

Details Exhaust system for film forming apparatus Exhaust system for film forming apparatus

1997-01-24

1998-08-04

Smith, Duane S.

Gas separation: processes

Heat exchanging

55267, 553851, 118 58, 118 61, 118723VE, 427250, 427350, 438681, 438905, 438909, B01D 5000

Patent

active

057887470

ABSTRACT:
An exhaust system for a film forming apparatus including an exhaust pipe passage connected to an exhaust port of the film forming apparatus for forming a film on a object by using vaporized gas of an organic metal compound. The film forming apparatus includes a pressure transfer unit provided for the exhaust pipe passage and arranged to transfer, through the exhaust pipe passage, gas in the film forming apparatus as exhaust gas. A cooling mechanism is provided for the pressure transfer unit and arranged to cool the pressure transfer unit to a temperature lower than a temperature, at which the organic metal compound is decomposed, so as to prevent precipitation of the organic metal compound contained in the exhaust gas introduced into the pressure transfer unit. A removing unit is disposed at an intermediate position of the exhaust pipe passage, downstream from the pressure transfer unit, so as to remove the organic metal compound contained in the exhaust gas which is introduced through the exhaust pipe passage.

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