4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus

Masafumi Ura

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Method for manufacturing single crystal semiconductor

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Method for pulling crystal

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Patent

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