4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Masaaki Nojiri

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Circuit-pattern inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Inspection apparatus for circuit pattern

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Inspection apparatus for inspecting patterns of a substrate

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3040252

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