4. Semiconductor device manufacturing: process
  5. Radiation or energy treatment modifying properties of...
  6. Ionized irradiation

Masaaki Miyagawa

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Focus ring and plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Method for improving heat transfer of a focus ring to a...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
Reexamination Certificate

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Substrate processing apparatus and focus ring

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3242895

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