4. Metal working
  5. Piezoelectric device making

Markku Antero Ylilammi

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Method for fabricating a resonator having an acoustic mirror

Metal working – Piezoelectric device making
Patent

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Method for fabricating a thin film bulk acoustic wave...

Metal working – Piezoelectric device making
Reexamination Certificate

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Method for performing on-wafer tuning of thin film bulk acoustic

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent

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Thin-film bulk acoustic resonator with enhanced power...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate

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Profile ID: LFUS-PAI-P-500647

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