4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Mark Schattenburg

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Hybrid transmission-reflection grating

Optical waveguides – With optical coupler – Input/output coupler
Reexamination Certificate

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Method and system for interference lithography utilizing...

Optical: systems and elements – Light interference
Reexamination Certificate

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X-ray lithography masking

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Profile ID: LFUS-PAI-P-209204

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