4. Coating processes
  5. With post-treatment of coating or coating material
  6. Heating or drying

Mark Ray

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Inter-level dielectrics with low dielectric constants

Coating processes – With post-treatment of coating or coating material – Heating or drying
Patent

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Inter-level dielectrics with low dielectric constants

Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond
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