Inter-level dielectrics with low dielectric constants

Details Inter-level dielectrics with low dielectric constants Inter-level dielectrics with low dielectric constants

1997-02-28

1998-03-31

Cameron, Erma

Coating processes

With post-treatment of coating or coating material

Heating or drying

4273882, B05D 714

Patent

active

057336067

ABSTRACT:
A metallization is coated with a network polymer. The network polymer may either a cross-linked polyfluorinated polyallylether-polyhydromethylsiloxane copolymer or a network polymer formed from cross-linked fluoromethylene cyanate ester monomers. These polymer networks are resistant to the diffusion of a metallization, such as copper, therethrough.

REFERENCES:
patent: 5292927 (1994-03-01), Griffith et al.
Hu et al, Polym. Mat. Sci. Eng. 72, 446-447 (1995).
Buckley et al, Mater. Res. Soc. Symp. Proc. (1995), 381, pp. 111-116.
Hu et al, Acs Symp. Ser. (1995), 614, pp. 369-378.
Hu et al, Polym. Prear. (1996), 37(1), 823-4.

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