Marie Angelopoulos

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Antireflective silicon-containing compositions as hardmask...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Antireflective silicon-containing compositions as hardmask...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making printing plates
Reexamination Certificate

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Antireflective SiO-containing compositions for hardmask layer

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Attenuated embedded phase shift photomask blanks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated embedded phase shift photomask blanks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-39007

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