4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Marco Ferrera

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Integrated angular speed sensor device and production method...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method for manufacturing integrated devices including...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Method for manufacturing integrated structures including...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Method for manufacturing integrated structures including...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Method of manufacturing pressure microsensors

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Profile ID: LFUS-PAI-P-1332569

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