4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Base includes an inorganic compound containing silicon or...

Marc Michael Kollrack

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Method for depositing amorphous silicon thin films onto...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Method for multilayer CVD processing in a single chamber

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2444172

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