4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Manoj Vellaikal

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Apparatus for improving barrier layer adhesion to HDP-FSG...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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HDP-CVD multistep gapfill process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Impurity control in HDP-CVD DEP/ETCH/DEP processes

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for improving barrier layer adhesion to HDP-FSG thin...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Nitrogen treatment of polished halogen-doped silicon glass

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2173936

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