4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Manoj Dalvie

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High-density plasma-processing tool with toroidal magnetic field

Coating apparatus – Gas or vapor deposition – With treating means
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Method and apparatus for tuning field for plasma processing usin

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Profile ID: LFUS-PAI-P-271388

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