4. Cleaning and liquid contact with solids
  5. Processes
  6. Including work heating or contact with combustion products

Madhavi Chandrachood

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Backside etching in a scrubber

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
Reexamination Certificate

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Groove cleaning device for chemical-mechanical polishing

Abrading – Accessory – Dressing
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Groove cleaning device for chemical-mechanical polishing

Abrading – Abrading process – With tool treating or forming
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Method and apparatus for reducing particle contamination...

Drying and gas or vapor contact with solids – Process – Gas or vapor pressure is subatmospheric
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Method for plasma etching a chromium layer suitable for...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Profile ID: LFUS-PAI-P-805479

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