4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Lyudmila Menn

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Apparatus for capturing and removing contaminant particles from

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for capturing and removing contaminant particles from an

Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized
Patent

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Profile ID: LFUS-PAI-P-303239

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