Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized
Patent
1996-12-09
1997-09-23
Pianalto, Bernard
Coating processes
Direct application of electrical, magnetic, wave, or...
Electrostatic charge, field, or force utilized
427 58, 427181, 4272084, 427237, 427238, 4272481, 427294, 427523, B05D 512
Patent
active
056702175
ABSTRACT:
A method of capturing and removing contaminant particles moving within an evacuated interior region of an ion beam implanter is disclosed. The steps of the method include: providing a particle collector having a surface to which contaminant particles readily adhere; securing the particle collector to the implanter such that particle adhering surface is in fluid communication to the contaminant particles moving within the interior region; and removing the particle collector from the implanter after a predetermined period of time. An ion implanter in combination with a particle collector for trapping and removing contaminant particles moving in an evacuated interior region of the implanter traversed by an ion beam is also disclosed, the particle collector including a surface to which the contaminant particles readily adhere and securement means for releasably securing the particle collector to the implanter such that the particle adhering surface is in fluid communication with the evacuated interior region of the implanter.
REFERENCES:
patent: 4022928 (1977-05-01), Piwcyzk
Duocel.RTM. Aluminum Foam, Energy Research and Generation, Inc., Oakland, California, 2 pages. (no date avail.).
Becker Robert
Blake Julian G.
Chipman David
Jones Mary
Menn Lyudmila
Eaton Corporation
Pianalto Bernard
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