Apparatus for capturing and removing contaminant particles from

Details Apparatus for capturing and removing contaminant particles from Apparatus for capturing and removing contaminant particles from

1995-12-18

1997-08-12

Pianalto, Bernard

Coating apparatus

Gas or vapor deposition

With treating means

118 50, 118500, 118504, 118715, 118723CB, 118723FI, C23C 1600

Patent

active

056560923

ABSTRACT:
A method of capturing and removing contaminant particles moving within an evacuated interior region of an ion beam implanter is disclosed. The steps of the method include: providing a particle collector having a surface to which contaminant particles readily adhere; securing the particle collector to the implanter such that particle adhering surface is in fluid communication to the contaminant particles moving within the interior region; and removing the particle collector from the implanter after a predetermined period of time. An ion implanter in combination with a particle collector for trapping and removing contaminant particles moving in an evacuated interior region of the implanter traversed by an ion beam is also disclosed, the particle collector including a surface to which the contaminant particles readily adhere and securement means for releasably securing the particle collector to the implanter such that the particle adhering surface is in fluid communication with the evacuated interior region of the implanter.

REFERENCES:
patent: 4022928 (1977-05-01), Piwcyzk
"Duocel Aluminum Foam," Energy Research and Generation, Inc., (Date Unknown).

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