4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Brushing

Lynn S. Ryle

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Apparatus for cleaning edges of contaminated substrates

Brushing – scrubbing – and general cleaning – Machines – Brushing
Reexamination Certificate

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Contamination control in substrate processing system

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy – Ultraviolet energy
Patent

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Megasonic bath

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent

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Method and apparatus for cleaning edges of contaminated substrat

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent

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Method and apparatus for detecting a substrate in a substrate pr

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent

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Profile ID: LFUS-PAI-P-105436

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