Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1994-07-15
1997-02-25
Wieder, Kenneth A.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324686, 324755, 414936, 414937, 1985021, 250223R, 340674, G01N 2186, G01R 2726
Patent
active
056062516
ABSTRACT:
An improved substrate processing system. The system may be used for double sided scrubbing of a semiconductor substrate. The wet stations of the system has covers which prevent accumulated liquid from dripping outside of the station and which minimize dripping on the substrates. Transport tunnels are provided between modules to prevent leakage between the modules. A substrate transport mechanism which is moveable along a rail is provided with the stabilizer to provide for stable substrate transfer. The processing system has two brush stations which are placed within a single enclosure. The sensors located throughout the system, which sense the presence of a wafer, are fixedly mounted in a frame so that they are self-aligned to one another. In the sender station, two sensors are used, with the system requiring both sensors to sense the presence of a wafer to increase the reliability. In the dry station, the heating lamp is shielded from the substrate to reduce particulate contamination. Various flow meters are mounted on a transparent panel to provide easy and convenient hook-up. The system is provided with an airflow control bulkhead between the clean and dirty side of the system to prevent intermixing to thereby provide for lower contamination levels in the clean side of the system.
REFERENCES:
patent: 4409087 (1983-10-01), Quick
patent: 4479089 (1984-10-01), Ferri et al.
patent: 4819167 (1989-04-01), Cheng et al.
patent: 4987407 (1991-01-01), Lee
patent: 5003188 (1991-03-01), Igari
patent: 5206627 (1993-04-01), Kato
patent: 5217120 (1993-06-01), Lee et al.
patent: 5225691 (1993-07-01), Powers et al.
patent: 5354995 (1994-10-01), Endo et al.
McGrath Martin J.
Ruppell Robert M.
Ryle Lynn S.
Thrasher David L.
Do Diep
OnTrak Systems, Inc.
Wieder Kenneth A.
LandOfFree
Method and apparatus for detecting a substrate in a substrate pr does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for detecting a substrate in a substrate pr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for detecting a substrate in a substrate pr will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1976441