Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
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Manufacturing gallium nitride substrates by lateral...
Method for epitaxial growth of a gallium nitride film...
Method for producing by vapour-phase epitaxy a gallium...
Process for producing an epitaxial layer of gallium nitride
Process for producing an epitaxial layer of gallium nitride
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