4. Measuring and testing
  5. Fluid pressure gauge
  6. Diaphragm

Lucas Novasensor

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Method and apparatus for thermally actuated self testing of sili

Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
Patent

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Miniature gauge pressure sensor using silicon fusion bonding and

Measuring and testing – Fluid pressure gauge – Diaphragm
Patent

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Semiconductor sensor with piezoresistors and improved electrosta

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent

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Single crystal silicon sensor with high aspect ratio and curvili

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Patent

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Single crystal silicon sensor with high aspect ratio and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Reexamination Certificate

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