4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Louise S. Barriss

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Device for the detection of substrates stacked with a...

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate

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Method and apparatus for inverting samples in a process

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Profile ID: LFUS-PAI-P-1149372

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