Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2006-09-19
2006-09-19
Luu, Thanh X. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559330, C250S559400, C414S411000, C414S416030, C414S416080, C414S937000
Reexamination Certificate
active
07109509
ABSTRACT:
For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation.A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4).The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.
REFERENCES:
patent: 5605428 (1997-02-01), Birkner et al.
patent: 5772386 (1998-06-01), Mages et al.
patent: 5906469 (1999-05-01), Oka et al.
patent: 6052193 (2000-04-01), Kim et al.
patent: 6053983 (2000-04-01), Saeki et al.
patent: 6082949 (2000-07-01), Rosenquist
patent: 6147356 (2000-11-01), Hahn et al.
patent: 6188323 (2001-02-01), Rosenquist et al.
patent: 6211514 (2001-04-01), Schultz et al.
patent: 6220808 (2001-04-01), Bonora et al.
patent: 6419439 (2002-07-01), Schlehahn et al.
patent: 6452201 (2002-09-01), Wang et al.
patent: 6470927 (2002-10-01), Otaguro
patent: 6655423 (2003-12-01), Rush et al.
patent: 6795202 (2004-09-01), Emoto et al.
patent: 6824344 (2004-11-01), Otaguro
patent: 6869263 (2005-03-01), Gilchrist
patent: 2001/0009641 (2001-07-01), Haraguchi et al.
patent: 2004/0099826 (2004-05-01), Igarashi et al.
patent: 4306957 (1994-06-01), None
patent: 19535871 (1997-04-01), None
patent: 19728478 (1999-02-01), None
patent: 19853446 (2000-05-01), None
patent: 2001284439 (2001-10-01), None
patent: 2002093885 (2002-03-01), None
Barriss Louise S.
Gilchrist Ulysses
Heinze Manfred
König Joachim
Lahne Berndt
Brooks Automation Inc.
Luu Thanh X.
Monbleau Davienne
Perman & Green LLP
Pickreign Richard
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