4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Litmas, Inc.

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Methods and apparatus for igniting and sustaining...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Methods and apparatus for plasma processing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Methods and apparatus for RF power delivery

Electric heating – Metal heating – By arc
Reexamination Certificate

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