4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By implanting or irradiating

Lisa V. Jaklitsch

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Method of making a sidewall-protected metallic pillar on a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Three-dimensional silicon on oxide device isolation

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
Reexamination Certificate

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