4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Lisa L. Yang

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Method of forming solder bumps on a semiconductor wafer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Sputtering chamber shield promoting reliable plasma ignition

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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