4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Li Yan Miao

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Self aligned double patterning flow with non-sacrificial...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned multi-patterning for advanced critical...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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