4. Optics: measuring and testing
  5. By light interference
  6. Having partially reflecting plates in series

Li-Jui Chen

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Fabry-Perot filter apparatus with enhanced optical...

Optics: measuring and testing – By light interference – Having partially reflecting plates in series
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Geometric compensation method for charged particle beam...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method of defining forbidden pitches for a lithography...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Micro-etching method to replicate alignment marks for...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Scatterometric method of monitoring hot plate temperature...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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