4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With registration indicia

Li-Heng Chou

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In-situ overlay alignment

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Photo-focus modulation method for forming transistor gates...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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System and method for providing process compliant layout...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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