4. Abrading
  5. Precision device or process - or with condition responsive...
  6. By optical sensor

Leonard C. Stevens, Jr.

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Apparatus and method for wafer cleaning

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Reexamination Certificate

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Method and apparatus for monitoring polishing pad wear...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method and apparatus of monitoring polishing pad wear during pro

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Patent

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Pad and roller assembly for cleaning semiconductor wafers

Brushing – scrubbing – and general cleaning – Implements – Fabric
Patent

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Profile ID: LFUS-PAI-P-577878

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