Pad and roller assembly for cleaning semiconductor wafers

Details Pad and roller assembly for cleaning semiconductor wafers Pad and roller assembly for cleaning semiconductor wafers

1996-07-24

1998-09-29

Till, Terrence

Brushing, scrubbing, and general cleaning

Implements

Fabric

1523019, 15102, A47L 2500

Patent

active

058130829

ABSTRACT:
A cleaning pad and roller assembly for cleaning semiconductor wafers. The pad may be a felt sheet with a pair of tabs located at opposite ends. The roller may be polyvinylchloride and may have a drive gear at one end and a clamp at each end. Each clamp is a clamping lever mounted on a shelf and may be locked in place by a clamping screw. Each clamping lever may have a pivot at one end and a serrated surface at an opposite end. The clamping screw may pass through the clamping lever into the shelf.

REFERENCES:
patent: 801003 (1905-10-01), Gordon
patent: 869572 (1907-10-01), Hunt
patent: 2630657 (1953-03-01), Harley
patent: 3610693 (1971-10-01), Solarek
patent: 3886622 (1975-06-01), Horst
patent: 4692975 (1987-09-01), Garcia
patent: 4947029 (1990-08-01), Kurihara et al.
patent: 5230124 (1993-07-01), Booth

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