Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
Inventor
active
Accelerometer with a combined self-test and ground electrode
Boron doped silicon accelerometer sense element
Fully integrated single-crystal silicon-on-insulator process, se
Integrated silicon automotive accelerometer and single-point imp
Method and apparatus for self-testing a single-point automotive
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