Accelerometer with a combined self-test and ground electrode

Details Accelerometer with a combined self-test and ground electrode Accelerometer with a combined self-test and ground electrode

1994-12-23

1996-12-24

Noland, Thomas P.

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

7351432, 73862626, G01P 2100, G01P 15125

Patent

active

055875181

ABSTRACT:
A micro-machined accelerometer includes a moveable metal plate, mounted upon a semiconductor substrate. The moveable metal plate includes an aperture which contains a pedestal and at least one torsion bar for connecting the pedestal to the moveable metal plate. Measurement electrodes formed on the semiconductor substrate combine with the metal plate to form measurement capacitors. A combined self-test/common electrode provides a dual function of a common electrode during operation of the accelerometer and a testing electrode during a self-test procedure.

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