4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Lawrence Lei

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Chemical vapor deposition hardware and process

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Fluid delivery system and method

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Heat exchange passage connection

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method and apparatus for reducing contamination of a substrate i

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Method for reducing contamination of a substrate in a...

Drying and gas or vapor contact with solids – Process – With fluid current conveying or suspension of treated material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-881404

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