4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Larry Bruce Fritzinger

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Capacitor for an integrated circuit

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Capacitor for an integrated circuit

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Reexamination Certificate

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Integrated circuit fabrication

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method of making a capacitor

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Method of making a capacitor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2005144

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