4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Larry A. Dworkin

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Method of eliminating photoresist poisoning in damascene...

Active solid-state devices (e.g. – transistors – solid-state diode – Polysilicon containing oxygen – nitrogen – or carbon
Reexamination Certificate

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Method of eliminating photoresist poisoning in damascene...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2661104

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