300 mm platen and belt configuration

Details 300 mm platen and belt configuration 300 mm platen and belt configuration

2005-05-03

2005-05-03

Hassanzadeh, Parviz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

C156S345200

Reexamination Certificate

active

06887338

ABSTRACT:
An invention is provided for a chemical mechanical planarization apparatus for processing 300 millimeter wafers. The CMP apparatus includes a polishing belt having a belt tension in a range of about 3000 lbs to 4000 lbs. In addition, a platen is disposed below the polishing belt at a positive platen height. The platen includes at least three air pressure zones, with each air pressure zone being capable of providing air pressure to a backside of the polishing belt. The platen can include, for example, eight air pressure zones. In this aspect, a second air pressure zone adjacent to a first outermost air pressure zone provides an air pressure in a range of about 30 psi to 50 psi, such as about 34 psi. In addition, a third air pressure zone a fourth pressure zone can each provide an air pressure in a range of about 4 psi to 13 psi, such as about 7 psi. In this aspect, the remaining air pressure zones can be set to 0 psi, which conserves fluid consumption. Additional fluid consumption reduction can be achieved using a plurality of check values disposed within an air supply system coupled to the platen, wherein the check values prevent negative airflow into the platen.

REFERENCES:
patent: 6328642 (2001-12-01), Pant et al.
patent: 6336845 (2002-01-01), Engdahl et al.
patent: 6712679 (2004-03-01), Taylor et al.
patent: 6722946 (2004-04-01), Talieh et al.
patent: 6729945 (2004-05-01), Xu et al.
patent: 6790128 (2004-09-01), Taylor et al.
patent: 20020151256 (2002-10-01), Taylor et al.

Affiliated with

Also associated with

Rating

300 mm platen and belt configuration does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with 300 mm platen and belt configuration, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and 300 mm platen and belt configuration will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3425389