4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Kyung-Sik Shim

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Apparatus of manufacturing a semiconductor device

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
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Atomic layer deposition method

Coating processes – Coating by vapor – gas – or smoke
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Atomic layer deposition method and semiconductor device...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2666925

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