4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Kyung-hyun Kim

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Apparatus and method for cleaning a semiconductor wafer

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Megasonic cleaning apparatus for fabricating semiconductor...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
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Method for fabricating MOS transistor using selective...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of fabrication on a gate pattern of a non-volatile...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of manufacturing a semiconductor device

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Profile ID: LFUS-PAI-P-1158394

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