4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Kyu-hwan Chang

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Deposited thin films and their use in separation and...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Substrate dicing
Reexamination Certificate

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Method of filling contact hole of semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method of forming trench isolation regions

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method of manufacturing a semiconductor capacitor having a...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of removing contaminants from integrated circuit...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Profile ID: LFUS-PAI-P-2453402

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