4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Kyoung-Bong Rouh

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Ion implantation apparatus and method for implanting ions by...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method for implanting ions in semiconductor device

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3109865

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