4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Kuowei Liu

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Integrated low k dielectrics and etch stops

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Integrated low K dielectrics and etch stops

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Integrated low K dielectrics and etch stops

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Integrated low k dielectrics and etch stops

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate

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Low dielectric constant film produced from silicon compounds...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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