Semiconductor device manufacturing: process
Chemical etching
Vapor phase etching
Inventor
active
Method providing an improved bi-layer photoresist pattern
Use of ammonia for etching organic low-k dielectrics
Use of ammonia for etching organic low-k dielectrics
No associations
LandOfFree
Kuo-Lung Tang does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Kuo-Lung Tang, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Kuo-Lung Tang will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2860577