4. Fluid handling
  5. With heating or cooling of the system
  6. Circulating fluid in heat exchange relationship

Kuniaki Horie

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Apparatus and method for processing substrate

Coating apparatus – Solid applicator contacting work – With work-handling or work-supporting
Reexamination Certificate

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Coating, modification and etching of substrate surface with...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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High energy sputtering method for forming interconnects

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Liquid feed vaporization system and gas injection device

Electric resistance heating devices – Heating devices – Vaporizer
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Liquid feed vaporization system and gas injection device

Electric resistance heating devices – Heating devices – Vaporizer
Reexamination Certificate

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Profile ID: LFUS-PAI-P-190509

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