4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. By reaction with substrate

Kristen Scheer

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Formation of ultra-thin oxide layers by self-limiting...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Interfacial oxidation process for high-k gate dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Method of forming uniform ultra-thin oxynitride layers

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2891176

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